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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1989),
  • paper CPD24

Fabrication of Silicon-Carbite Holographic Grating by Excimer Lasers

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Abstract

It is being needed to develop diffraction grating tor X-ray laser or synclotoron radiation which has high refrectivity and superior heat resistance in the range of soft X-ray.

© 1989 Optical Society of America

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