Abstract
In this Letter, a high-accuracy, two-dimensional displacement sensor is proposed, designed, and demonstrated based on the concept of an extrinsic Fabry–Perot Interferometer. The sensor is composed of two bundled single-mode optic fibers in parallel and two plasmonic metasurface resonators inscribed on a gold substrate via a focused ion beam. The fiber end surface and the metasurface are in parallel with a small cavity between. The cavity change or ${Z}$-component displacement is determined from the pattern of interference fringes. The ${X}$-component displacement, perpendicular to the ${Z}$ component, is identified from wavelength-selective metasurface resonators, which possess unique resonant wavelengths due to different nanostructure designs. The sensor was calibrated with six displacements applied through a three-axis precision linear stage. Test results indicated that the proposed interferometer can measure displacements with a maximum error of 5.4 µm or 2.2%.
© 2020 Optical Society of America
Full Article | PDF ArticleMore Like This
Zihao Wang, Zhilin Xu, Liuyang Chen, Yi Shi, Xiaoyun Wang, Junhui Wu, Ji Fan, and Liangcheng Tu
Opt. Lett. 46(16) 3945-3948 (2021)
Chen Zhu, Huitong Deng, Zhenming Ding, Jie Huang, and Ziyang Zhang
Opt. Lett. 46(23) 5838-5841 (2021)
Md. Shamim Mahmud, Daniel Rosenmann, David A. Czaplewski, Jie Gao, and Xiaodong Yang
Opt. Lett. 45(19) 5372-5375 (2020)