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Highly precise in-plane displacement sensor based on an asymmetric fiber Fabry–Perot interferometer

Zihao Wang, Zhilin Xu, Liuyang Chen, Yi Shi, Xiaoyun Wang, Junhui Wu, Ji Fan, and Liangcheng Tu

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Abstract

An in-plane displacement sensor based on an asymmetric extrinsic fiber Fabry–Perot interferometer (EFPI) is proposed and demonstrated. The asymmetric EFPI composed of a step-shaped external reflector and a cleaved fiber end face can be equivalent to two parallel FPIs with slightly different cavity lengths. By calculating the peak intensity difference of the two FPIs, the in-plane displacement can be demodulated with enhanced sensitivity and suppressed common mode noise. Both theoretical analyses and experimental results show that the sensitivity and the linear range of the in-plane displacement sensor are dependent on the cavity length. A displacement resolution of 5 nm and a linear range of $\pm {7}\;\unicode{x00B5}{\rm m}$ under the cavity length of 250 µm are achieved in the experiment. The proposed in-plane displacement sensor with a nanometric resolution and compact size can be widely used in the fields of metrology, accelerometers, and semiconductor manufacture.

© 2021 Optical Society of America

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