Abstract

This paper presents the results of a study of the structural, optical, and photoluminescence properties of nanostructured zinc oxide films created by the method of ion–plasma sputtering of a metallic target at various gas pressures. It is shown that such zinc oxide films possess optical and photoluminescence properties close to those of single-crystal zinc oxide and can be used as a material for creating thin-film acoustooptic devices that operate on surface acoustic waves or for the receptor areas of UV photodetectors.

© 2015 Optical Society of America

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