Abstract

In an optical interferometer that uses sinusoidal modulation and quadrature detection, the amplitude and offset of the interference signal vary with time, even without considering system noise. As a result, the circular Lissajous figure becomes elliptical, with wide lines. We propose and experimentally demonstrate a method for compensating quadrature detection error, based on digital signal processing to deal with scaling and fitting. In scaling, fluctuations in the amplitudes of in-phase and quadrature signals are compensated, and the scaled signals are fitted to a Lissajous unit circle. To do so, we scale the average fluctuation, remove the offset, and fit the ellipse to a unit circle. Our measurements of a target moving with uniform velocity show that we reduce quadrature detection error from 5 to 2 nanometers.

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  13. K. A. Murphy, M. F. Gunther, A. M. Vengsarkar, and R. O. ClausQuadrature phase-shifted, extrinsic Fabry-Perot optical fiber sensorsOpt. Lett.199116273275

Other (13)

O. Sasaki and K. TakahashiSinusoidal phase modulating interferometer using optical fibers for displacement measurementAppl. Opt.19882741394142

O. Sasaki, K. Takahashi, and T. SuzukiSinusoidal phase modulating laser diode interferometer with a feedback control system to eliminate external disturbanceOpt. Eng.19902915111515

K. Thurner, F. P. Quacquarelli, P.-F. Braun, C. D. Savio, and K. KarraiFiber-based distance sensing interferometryAppl. Opt.20155430513063

K. Thurner, P.-F. Braun, and K. KarraiAbsolute distance sensing by two laser optical interferometryRev. Sci. Instrum.201384115002

B. K. Nowakowski, D. T. Smith, and S. T. SmithHighly compact fiber Fabry-Perot interferometer: A new instrument designRev. Sci. Instrum.201687115102

J.-H. Hwang, S. Seon, and C.-S. ParkPosition estimation of sound source using three optical Mach-Zehnder Acoustic Sensor ArrayCurr. Opt. Photon.20176573578

M. Zhang, C. Ni, Y. Zhu, C. Hu, J. Hu, L. Wang, and S. DingSinusoidal phase-modulating laser diode interferometer for wide range displacement measurementAppl. Opt.20175656855691

C.-M. Wu and C.-S. SuNonlinearity in measurements of length by optical interferometryMeas. Sci. Technol.199676268

N. BobroffResidual errors in laser interferometry from air turbulence and nonlinearityAppl. Opt.19872626762682

G. Dai, F. Pohelnz, H.-U. Danzebrink, K. Hasche, and G. WilkeningImproving the performance of interferometers in metrological scanning probe microscopesMeas. Sci. Technol.200415444450

Y.-C. Wang, L.-H. Shyu, C.-P. Chang, and E. ManskeSignal interpolation method for quadrature phase-shifted Fabry-Perot interferometer58th Ilmenau Scientific Colloquium2014

P. L. M. HeydemannDetermination and correction of quadrature fringe measurement errors in interferometersAppl. Opt.19812033823384

K. A. Murphy, M. F. Gunther, A. M. Vengsarkar, and R. O. ClausQuadrature phase-shifted, extrinsic Fabry-Perot optical fiber sensorsOpt. Lett.199116273275

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