Abstract
A infrared light trapping structure combining front subwavelength gratings and
rear ZnO:Al nanoparticles for a PtSi Schottky-barrier detector over a 3–5 μm waveband is
theoretically investigated. By selecting the proper plasmonic material and optimizing
the parameters for the proposed structure, the absorption of the PtSi layer is
dramatically improved. The theoretical results show that this improvement eventually
translates into an equivalent external quantum efficiency (EQE) enhancement of 2.46
times at 3–3.6 μm and 2.38 times at 3.6–5 μm compared to conventional structures. This
improvement in the EQE mainly lies in the increase of light path lengths within the PtSi
layer by the subwavelength grating diffraction and nanoparticle-scattering
effects.
© 2016 Chinese Laser Press
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