Abstract
Silicon-on-insulator (SOI) technology offers tremendous potential for integration of optoelectronic functions on a silicon wafer. In this letter, a 1 × 1 multimode interference (MMI) Mach-Zender interferometer (MZI) thermo-optic modulator fabricated by wet-etching method is demonstrated. The modulator has an extinction ratio of -11.0 dB, extra loss of -4.9 dB and power consumption of 420 mW. The response time is less than 30 ?s.
© 2005 Chinese Optics Letters
PDF Article
More Like This
Fast thermo-optical modulators with doped-silicon heaters operating at 2 μm
Chuyu Zhong, Hui Ma, Chunlei Sun, Maoliang Wei, Yuting Ye, Bo Tang, Peng Zhang, Ruonan Liu, Junying Li, Lan Li, and Hongtao Lin
Opt. Express 29(15) 23508-23516 (2021)
Cited By
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription