Axisymmetric surface shape correction of optical elements by a wide-aperture ion beam

Aleksei Chernyshev; Nikolay Chkhalo; Ilya Malyshev; Mikhail Mikhailenko; Alexey Pestov; Nikolay Salashchenko; Mikhail Toropov

doi:10.1364/AO.472504

Applied Optics
Vol. 61,
Issue 33,
pp. 9879-9887
(2022)
•https://doi.org/10.1364/AO.472504

Axisymmetric surface shape correction of optical elements by a wide-aperture ion beam

Aleksei Chernyshev, Nikolay Chkhalo, Ilya Malyshev, Mikhail Mikhailenko, Alexey Pestov, Nikolay Salashchenko, and Mikhail Toropov

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Aleksei Chernyshev, Nikolay Chkhalo, Ilya Malyshev, Mikhail Mikhailenko, Alexey Pestov, Nikolay Salashchenko, and Mikhail Toropov, "Axisymmetric surface shape correction of optical elements by a wide-aperture ion beam," Appl. Opt. 61, 9879-9887 (2022)

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Abstract

Methods for calculating the process of axisymmetric surface shape correction with a wide-aperture ion beam through a forming diaphragm for optical elements with a round and arbitrary border shape are presented. In the case of circular optical elements, an approach based on the separation of the axisymmetric component of the surface shape error from its decomposition by Zernike polynomials is used. In the case of optical elements with an arbitrary border shape (not round), an algorithm for searching the axisymmetric component of the shape error is proposed. The search criterion is to minimize the residual volume of the deviation of the surface shape from the calculated one. The proposed algorithm makes it possible to separate the axisymmetric component of the shape error relative to an arbitrary axis, including one located outside the workpiece. The results of surface treatment in accordance with the above methods are presented.

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Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

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Equations (10)

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Purpose	Range	Minimum Step
Tilt, ( $θ$ )	$\pm 35^{\circ}$	0.01°
Axial rotation, ( $ω$ )	0°–360°	0.01°
Linear movement along sample axis, ( $X$ )	0–50 mm	0.05 mm
Linear movement across sample axis, ( $ρ$ )	0–160 mm	0.05 mm
Rotation around vertical axis, ( $ψ$ )	0°–120°	0.01°
Shutter rotation, ( $φ$ )	open-close	–

Parameter	Value
Source type	Radio frequency $f = 13.56 M H z$
Ion optical system	twin-grid flat
Operating gas	inert, $O_{2}, N_{2}, C_{2} H_{8}$ et al.
Operating pressure, Pa	$(1.0 - 2.0) {\cdot 10}^{- 2}$
Aperture, mm	$\emptyset 150$
Ion current (max), mA	400
Ion energy, eV	200–1000

Purpose	Range	Minimum Step
Tilt, ( $θ$ )	$\pm 35^{\circ}$	0.01°
Axial rotation, ( $ω$ )	0°–360°	0.01°
Linear movement along sample axis, ( $X$ )	0–50 mm	0.05 mm
Linear movement across sample axis, ( $ρ$ )	0–160 mm	0.05 mm
Rotation around vertical axis, ( $ψ$ )	0°–120°	0.01°
Shutter rotation, ( $φ$ )	open-close	–

Parameter	Value
Source type	Radio frequency $f = 13.56 M H z$
Ion optical system	twin-grid flat
Operating gas	inert, $O_{2}, N_{2}, C_{2} H_{8}$ et al.
Operating pressure, Pa	$(1.0 - 2.0) {\cdot 10}^{- 2}$
Aperture, mm	$\emptyset 150$
Ion current (max), mA	400
Ion energy, eV	200–1000

Abstract

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Figures (14)

Tables (2)

Equations (10)

Applied Optics