Abstract
Based on the Talbot effect of optical gratings, we propose a novel out-of-plane optical displacement sensor with an ultracompact structure, to the best of our knowledge. Using two optical gratings with a slight angle between them, two angular-modulated signals with a phase difference of 90° are obtained associated with a two-quadrant photodetector, which are in sinusoidal relationship with the displacement in the direction perpendicular to the grating plane. Using an interpolation subdivision circuit with a subdivision factor of 1000, out-of-plane displacement measurement with a resolution of 11.23 nm within a range of 1 mm is obtained.
© 2022 Optica Publishing Group
Full Article | PDF ArticleCorrections
21 November 2022: A correction was made to affiliation.
More Like This
Chenguang Xin, Zhiyong Yang, Jie Qi, Qianqi Niu, Xiaochen Ma, Changjiang Fan, and Mengwei Li
Opt. Express 30(22) 40009-40017 (2022)
Jie Qi, Meimei Gong, Kunyang Xie, Bin Cao, Liming Jin, Weiping Tang, Rui Zhang, Li Jin, Yanru Zhou, Mengwei Li, and Chenguang Xin
Appl. Opt. 60(25) 7518-7522 (2021)
Liming Jin, Ce Wang, Li Jin, Wenqing Chen, Haodong Xu, Min Cui, and Mengwei Li
Appl. Opt. 61(18) 5386-5391 (2022)