Abstract

Full aperture polishing is a significant process to fabricate optical workpieces with nano figure precision. It has the characteristics of excellent full spectrum uniform removal ability, fast convergence speed, high machining accuracy, and low production cost, which makes it the first choice for the processing of large-aperture optical elements. However, with BK7 glass it is difficult to achieve deterministic processing due to its large thermal expansion coefficient and other factors, and the surface shape accuracy is difficult to improve. In this paper, the thermal deformation of BK7 glass is analyzed first, and then the temperature distribution in the element is measured during full-aperture polishing. The influence of the temperature field in the optics on the accuracy of the final surface shape is analyzed, and the quantitative relationship between the temperature difference and the surface shape is established. In addition, the methods of deterministically controlling the surface shape of optics such as polishing liquid temperature control and immersion polishing are proposed. Finally, the model of quantitative control of the surface shape of optics is verified by experiments, which improve the surface shape accuracy of 600 mm BK7 optics to ${0.2}\lambda$.

© 2021 Optical Society of America

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