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Scatterometry specialized for a highly asymmetric triangular grating on a transparent substrate

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Abstract

We present a specialized scatterometry method to measure the groove profiles of highly asymmetric triangular gratings. Compared with the conventional scatterometry working in a specular way, this method utilizes diffraction spectra of the reflected ±1st orders and is good at measuring this kind of asymmetric grating with a higher sensitivity. In our work, diffraction efficiency angular spectra at a single wavelength are measured and passed on to a parameter optimization process to retrieve three profile defining parameters. Final results are compared with the ones from an atomic force microscope and discrepancies are discussed and explained.

© 2014 Optical Society of America

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