Abstract
We present an algorithm that simultaneously deduces from real-time ellipsometric measurements both the growth rate and the composition of films deposited via chemical vapor deposition. The heart of the algorithm is a dynamic, first-principles model of the deposition system and the ellipsometric sensor. The model predicts the ellipsometric parameters Ψ and Δ during film growth. An extended Kalman filter is developed that utilizes the sensor model and infers both the growth rate and the Ge composition of the deposited film in real time. Two simulations demonstrating the effectiveness of the algorithm are evaluated.
© 2006 Optical Society of America
Full Article | PDF ArticleMore Like This
Seyedeh Fahimeh Banihashemian, Joshua M. Grant, Abbas Sabbar, Huong Tran, Oluwatobi Olorunsola, Solomon Ojo, Sylvester Amoah, Mehrshad Mehboudi, Shui-Qing Yu, Aboozar Mosleh, and Hameed A. Naseem
Opt. Mater. Express 10(9) 2242-2253 (2020)
Wei Dou, Bader Alharthi, Perry C. Grant, Joshua M. Grant, Aboozar Mosleh, Huong Tran, Wei Du, Mansour Mortazavi, Baohua Li, Hameed Naseem, and Shui-Qing Yu
Opt. Mater. Express 8(10) 3220-3229 (2018)
E. Masetti, M. Montecchi, R. Larciprete, and S. Cozzi
Appl. Opt. 35(28) 5626-5629 (1996)