Roles of propagating and evanescent waves in solid immersion lens systems

Tom D. Milster; Joshua S. Jo; Kusato Hirota

doi:10.1364/AO.38.005046

Roles of propagating and evanescent waves in solid immersion lens systems

Tom D. Milster, Joshua S. Jo, and Kusato Hirota

Applied Optics
Vol. 38,
Issue 23,
pp. 5046-5057
(1999)
•https://doi.org/10.1364/AO.38.005046

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Tom D. Milster, Joshua S. Jo, and Kusato Hirota, "Roles of propagating and evanescent waves in solid immersion lens systems," Appl. Opt. 38, 5046-5057 (1999)

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Previously assigned OCIS codes
- Optical data storage (210.0210)

About this Article
History
- Original Manuscript: April 8, 1999
- Revised Manuscript: April 8, 1999
- Published: August 10, 1999

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Abstract

The electromagnetic field incident on the thin-film layers in a solid immersion lens (SIL) system is decomposed into contributions from homogeneous and inhomogeneous waves, which are commonly referred to as propagating and evanescent waves, respectively. The homogeneous and the inhomogeneous parts have different properties with respect to the field distribution in the gap and inside the recording layers. The homogeneous part is shown to diffract like a focused wave with a numerical aperture of 1, and the inhomogeneous part decays exponentially away from the bottom of the SIL. Two examples are discussed in detail, and the concept of a vector illumination system transfer function, which includes effects of the recording layers, is introduced.

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Component	Full Assembly	Subassembly
Transverse reflection	$r = \frac{A_{0}^{r}}{A_{0}^{i}}$	$r_{j + 1} = \frac{A_{j + 1}^{r}}{A_{j + 1}^{i}}$
Transverse transmission	$τ = \frac{A_{m}^{t}}{A_{0}^{i}}$	$τ_{j + 1} = \frac{A_{m}^{t}}{A_{j + 1}^{i}}$
Axial reflection	$r_{z} = \frac{A_{0, z}^{r}}{A_{0, z}^{i}}$	$r_{j + 1, z} = \frac{A_{j + 1, z}^{r}}{A_{j + 1, z}^{i}}$
Axial transmission	$τ_{z} = \frac{A_{m, z}^{t}}{A_{0, z}^{i}}$	$τ_{j + 1, z} = \frac{A_{m, z}^{t}}{A_{j + 1, z}^{i}}$

	Geometry A	Geometry B
NA	0.895	0.895
λ (nm)	650	650
n _SIL	1.9	1.9
n _SUBSTRATE	1.0	1.9
t _GAP (nm)	—	100

Component	Full Assembly	Subassembly
Transverse reflection	$r = \frac{A_{0}^{r}}{A_{0}^{i}}$	$r_{j + 1} = \frac{A_{j + 1}^{r}}{A_{j + 1}^{i}}$
Transverse transmission	$τ = \frac{A_{m}^{t}}{A_{0}^{i}}$	$τ_{j + 1} = \frac{A_{m}^{t}}{A_{j + 1}^{i}}$
Axial reflection	$r_{z} = \frac{A_{0, z}^{r}}{A_{0, z}^{i}}$	$r_{j + 1, z} = \frac{A_{j + 1, z}^{r}}{A_{j + 1, z}^{i}}$
Axial transmission	$τ_{z} = \frac{A_{m, z}^{t}}{A_{0, z}^{i}}$	$τ_{j + 1, z} = \frac{A_{m, z}^{t}}{A_{j + 1, z}^{i}}$

	Geometry A	Geometry B
NA	0.895	0.895
λ (nm)	650	650
n _SIL	1.9	1.9
n _SUBSTRATE	1.0	1.9
t _GAP (nm)	—	100

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