Abstract
The electromagnetic field incident on the thin-film layers in a
solid immersion lens (SIL) system is decomposed into contributions
from homogeneous and inhomogeneous waves, which are commonly referred
to as propagating and evanescent waves, respectively. The
homogeneous and the inhomogeneous parts have different properties with
respect to the field distribution in the gap and inside the recording
layers. The homogeneous part is shown to diffract like a focused
wave with a numerical aperture of 1, and the inhomogeneous part decays
exponentially away from the bottom of the SIL. Two examples are
discussed in detail, and the concept of a vector illumination system
transfer function, which includes effects of the recording layers, is
introduced.
© 1999 Optical Society of America
Full Article |
PDF Article
More Like This
References
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access OSA Member Subscription
Cited By
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access OSA Member Subscription
Tables (2)
You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access OSA Member Subscription
Equations (35)
You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access OSA Member Subscription
Metrics
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access OSA Member Subscription