Optical properties of palladium in the visible and near UV spectral regions

Brian T. Sullivan

doi:10.1364/AO.29.001964

Optical properties of palladium in the visible and near UV spectral regions

Brian T. Sullivan

Applied Optics
Vol. 29,
Issue 13,
pp. 1964-1970
(1990)
•https://doi.org/10.1364/AO.29.001964

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Brian T. Sullivan, "Optical properties of palladium in the visible and near UV spectral regions," Appl. Opt. 29, 1964-1970 (1990)

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History
- Original Manuscript: February 16, 1989
- Published: May 1, 1990

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Abstract

The dielectric function data, ∊ = ∊₁ + i∊₂, of palladium thin films prepared by dc magnetron sputtering are given for the spectral range 1.6–5.5 eV. A comparison is made between these results and those obtained for Pd films and bulk specimens over the past twenty years. While a number of measurements show good agreement in ∊₁, there is a considerable variation in the ∊₂ data among the different groups. Some of these differences can be explained either by the sample preparation, which affects the morphology of the films, or else by uncertainties related to film thickness.

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Authors	Deposition/Pressure(Torr)	Rate (Å/s)	Thickness (Å)	Comments	Measurement Technique
(WB)3	bulk	—	—	annealed, polished	Calorimetric (4.2K)
(LATV)7	evaporation (1×10⁻⁸)	60	320	annealed	R, T (air)
(VAW)10	evaporation (1×10⁻⁸)	150	2000		Reflectance (1×10⁻⁸ Torr)
(JC)9	evaporation (3×10⁻⁶))	50	375		R, T (N₂)
(Sp)13	dc sputtering (1×10⁻⁶)	25	3000		Ellipsometry
(YS)11	evaporation (7×10⁻⁸)	—	opaque		Reflectance (5×10⁻⁹ Torr)
	evaporation (7×10⁻⁸)	—	opaque		Reflectance (5×10⁻⁹ Torr)
(DKM)4	bulk	—	—	electro-polished	Ellipsometry
(MBBA)6	bulk	—	—	polished	Ellipsometry

E(eV)	λ(μm)	∊₁	∊₂	n	k

1.60	0.775	−21.80	24.76	2.37	5.23
1.70	0.729	−19.87	22.56	2.26	5.00
1.80	0.689	−18.24	20.63	2.16	4.78
1.90	0.653	−16.77	18.93	2.06	4.59
2.00	0.620	−15.45	17.51	1.99	4.40
2.10	0.590	−14.31	16.25	1.92	4.24
2.20	0.564	−13.28	15.09	1.85	4.09
2.30	0.539	−12.37	14.09	1.79	3.94
2.40	0.517	−11.54	13.17	1.73	3.81
2.50	0.496	−10.77	12.32	1.67	3.68
2.60	0.477	−10.09	11.56	1.62	3.57
2.70	0.459	−9.44	10.86	1.57	3.45
2.80	0.443	−8.85	10.22	1.53	3.34
2.90	0.428	−8.29	9.64	1.49	3.24
3.00	0.413	−7.77	9.11	1.45	3.14
3.10	0.400	−7.30	8.64	1.42	3.05
3.20	0.387	−6.85	8.21	1.39	2.96
3.30	0.376	−6.43	7.81	1.36	2.88
3.40	0.365	−6.04	7.46	1.33	2.80
3.50	0.354	−5.69	7.14	1.31	2.72
3.60	0.344	−5.36	6.84	1.29	2.65
3.70	0.335	−5.05	6.57	1.27	2.58
3.80	0.326	−4.77	6.32	1.25	2.52
3.90	0.318	−4.50	6.08	1.24	2.46
4.00	0.310	−4.25	5.86	1.22	2.40
4.10	0.302	−4.01	5.67	1.21	2.34
4.20	0.295	−3.79	5.50	1.20	2.29
4.30	0.288	−3.60	5.35	1.19	2.24
4.40	0.282	−3.44	5.22	1.19	2.20
4.50	0.276	−3.30	5.09	1.18	2.16
4.60	0.270	−3.20	4.97	1.16	2.13
4.70	0.264	−3.11	4.82	1.15	2.10
4.80	0.258	−3.03	4.66	1.12	2.07
4.90	0.253	−2.94	4.48	1.10	2.04
5.00	0.248	−2.86	4.30	1.07	2.00
5.10	0.243	−2.75	4.12	1.05	1.96
5.20	0.238	−2.65	3.95	1.03	1.92
5.30	0.234	−2.54	3.78	1.00	1.88
5.40	0.230	−2.43	3.63	0.98	1.84
5.50	0.225	−2.30	3.47	0.96	1.80

Authors	Deposition/Pressure(Torr)	Rate (Å/s)	Thickness (Å)	Comments	Measurement Technique
(WB)3	bulk	—	—	annealed, polished	Calorimetric (4.2K)
(LATV)7	evaporation (1×10⁻⁸)	60	320	annealed	R, T (air)
(VAW)10	evaporation (1×10⁻⁸)	150	2000		Reflectance (1×10⁻⁸ Torr)
(JC)9	evaporation (3×10⁻⁶))	50	375		R, T (N₂)
(Sp)13	dc sputtering (1×10⁻⁶)	25	3000		Ellipsometry
(YS)11	evaporation (7×10⁻⁸)	—	opaque		Reflectance (5×10⁻⁹ Torr)
	evaporation (7×10⁻⁸)	—	opaque		Reflectance (5×10⁻⁹ Torr)
(DKM)4	bulk	—	—	electro-polished	Ellipsometry
(MBBA)6	bulk	—	—	polished	Ellipsometry

E(eV)	λ(μm)	∊₁	∊₂	n	k

1.60	0.775	−21.80	24.76	2.37	5.23
1.70	0.729	−19.87	22.56	2.26	5.00
1.80	0.689	−18.24	20.63	2.16	4.78
1.90	0.653	−16.77	18.93	2.06	4.59
2.00	0.620	−15.45	17.51	1.99	4.40
2.10	0.590	−14.31	16.25	1.92	4.24
2.20	0.564	−13.28	15.09	1.85	4.09
2.30	0.539	−12.37	14.09	1.79	3.94
2.40	0.517	−11.54	13.17	1.73	3.81
2.50	0.496	−10.77	12.32	1.67	3.68
2.60	0.477	−10.09	11.56	1.62	3.57
2.70	0.459	−9.44	10.86	1.57	3.45
2.80	0.443	−8.85	10.22	1.53	3.34
2.90	0.428	−8.29	9.64	1.49	3.24
3.00	0.413	−7.77	9.11	1.45	3.14
3.10	0.400	−7.30	8.64	1.42	3.05
3.20	0.387	−6.85	8.21	1.39	2.96
3.30	0.376	−6.43	7.81	1.36	2.88
3.40	0.365	−6.04	7.46	1.33	2.80
3.50	0.354	−5.69	7.14	1.31	2.72
3.60	0.344	−5.36	6.84	1.29	2.65
3.70	0.335	−5.05	6.57	1.27	2.58
3.80	0.326	−4.77	6.32	1.25	2.52
3.90	0.318	−4.50	6.08	1.24	2.46
4.00	0.310	−4.25	5.86	1.22	2.40
4.10	0.302	−4.01	5.67	1.21	2.34
4.20	0.295	−3.79	5.50	1.20	2.29
4.30	0.288	−3.60	5.35	1.19	2.24
4.40	0.282	−3.44	5.22	1.19	2.20
4.50	0.276	−3.30	5.09	1.18	2.16
4.60	0.270	−3.20	4.97	1.16	2.13
4.70	0.264	−3.11	4.82	1.15	2.10
4.80	0.258	−3.03	4.66	1.12	2.07
4.90	0.253	−2.94	4.48	1.10	2.04
5.00	0.248	−2.86	4.30	1.07	2.00
5.10	0.243	−2.75	4.12	1.05	1.96
5.20	0.238	−2.65	3.95	1.03	1.92
5.30	0.234	−2.54	3.78	1.00	1.88
5.40	0.230	−2.43	3.63	0.98	1.84
5.50	0.225	−2.30	3.47	0.96	1.80

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