Abstract

A technique is proposed to measure the thickness of a small area of photoresist film on a substrate. This technique uses the fluorescence (peak wavelength, ~600 nm) induced in the film by a focused laser beam (wavelength, 497 nm). An initial calibration line is obtained by comparing several thicknesses and their related fluorescence. The film’s thickness is then determined from its fluorescence signal. The laser spot size and the accuracy of this measurement have also been estimated.

© 1988 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Measurement of temperature in flames using laser induced fluorescence spectroscopy of OH

Calvin Chan and John W. Daily
Appl. Opt. 19(12) 1963-1968 (1980)

Oil film thickness measurement using airborne laser-induced water Raman backscatter

F. E. Hoge and R. N. Swift
Appl. Opt. 19(19) 3269-3281 (1980)

Laser-based diagnostics for the measurement of liquid water film thickness

Daniel Greszik, Huinan Yang, Thomas Dreier, and Christof Schulz
Appl. Opt. 50(4) A60-A67 (2011)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (5)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription