Abstract

The paper describes an interferometer for use in the thickness determination of optical thin films. The standard deviation obtained by repeated measurements is of the order of 0.3 nm. In those measurements, the thickness is obtained as a fraction of the applied wavelength, which consequently acts as the unit of length. The method does not require a layer of known thickness for calibration.

© 1988 Optical Society of America

Full Article  |  PDF Article
More Like This
Photoresist thickness measurement using laser-induced fluorescence

Shigeharu Kimura and Katsumi Takami
Appl. Opt. 27(17) 3675-3678 (1988)

Optical fiber sensors using a phase detection of Young’s fringes

Suezou Nakadate
Appl. Opt. 27(23) 4826-4830 (1988)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (15)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription