Experiments of Noncontact Nano-displacement Sensing by Alternating Quadrature Phase Modulated Reference Light

Mitsuki Kondo; Ayumi Ito; Xiaoyan Wang; Masanori Hanawa

doi:10.1364/SENSORS.2023.STu3D.5

Optica Sensing Congress 2023 (AIS, FTS, HISE, Sensors, ES)
Technical Digest Series (Optica Publishing Group, 2023),
paper STu3D.5
•https://doi.org/10.1364/SENSORS.2023.STu3D.5

Experiments of Noncontact Nano-displacement Sensing by Alternating Quadrature Phase Modulated Reference Light

Mitsuki Kondo, Ayumi Ito, Xiaoyan Wang, and Masanori Hanawa

Optical Sensors 2023

Munich Germany
30 July–3 August 2023
ISBN: 978-1-957171-24-1

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Optical Fibre Sensing I (STu3D)

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M. Kondo, A. Ito, X. Wang, and M. Hanawa, "Experiments of Noncontact Nano-displacement Sensing by Alternating Quadrature Phase Modulated Reference Light," in Optica Sensing Congress 2023 (AIS, FTS, HISE, Sensors, ES), Technical Digest Series (Optica Publishing Group, 2023), paper STu3D.5.

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Abstract

The use of quadrature phase modulated reference light simplified optical noncontact nanometer displacement measurements and provided 99.9% of measurement linearity from few nanometers to almost one hundred nanometers with a resolution of approximately 0.36nm.

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