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Conferences > SXRAY > 1993 > WA > WA.4

The Investigation of Discharge-laser-driven Plasmas as Sources for Soft X-ray Projection Lithography*

Paul D. Rockett, John A. Hunter, Richard E. Olson, William C. Sweatt, Glenn D. Kubiak, Kurt W. Berger, Randal L. Schmitt, Harry Shields, Michael Powers, and David L. Windt

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Abstract

Following two years of work to understand the conversion of excimer laser light into soft x-rays, we have moved onto implementing code predictions to improve conversion, and to studying the optical characteristics of these sources.

© 1993 Optical Society of America

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