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Conferences > SXRAY > 1993 > WA > WA.2

Laser Plasma Source Characterization for Soft X-ray Projection Lithography

William Silfvast, M.C. Richardson, H. Bender, A.M. Eigon, A. Hanzo, E. Miesak, and F. Jin

Open Access Open Access

Abstract

A review of the status of laser plasma soft x-ray sources will be made. This will include discussions of radiation properties as well as particulate emission and interdiction techniques.

© 1993 Optical Society of America

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