In this paper, surface roughness effect on Q-factor of Ge whispering gallery mode (WGM) microdisk resonator is thoroughly investigated by 2D and 3D finite-difference time-domain (FDTD) simulation. Results reveal that the effective radius of nanohole along a microdisk perimeter, roughness index, significantly degrades the device Q-factor and should be sub-100 nm.

© 2011 Optical Society of America

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