Abstract
The evolution of interfacial roughness in multilayer films is examined by varying deposition parameters. X-ray scattering results from W/C will be compared with growth models.
© 1994 Optical Society of America
PDF ArticleMore Like This
A Stochastic Model for Multilayer Growth
D. G. Stearns
MC.9 Physics of X-Ray Multilayer Structures (PXRAYMS) 1994
Characterization of interface structure in multilayers using specular x-ray reflectance
Eric E. Fullerton
TuA.1 Physics of X-Ray Multilayer Structures (PXRAYMS) 1994
Characterization of Interface Structure in Multilayers Using Diffuse X-Ray Scattering
S. K. Sinha
TuB.1 Physics of X-Ray Multilayer Structures (PXRAYMS) 1994