Abstract

The deposition technique of LSM's efficiently reflecting in the soft x-ray region (SXR) should satisfy the following requirements: to be capable of depositing continuous superthin layers up to 5Å thick, to control thickness and crystal structure of superthin layers, to sustain the period thickness at the LSM depth with an accuracy to hundredth fractions of the period. Thus, the admissible rms height of interfacial LSM roughness should not exceed 2-5Å, while the accuracy of sustaining the period thickness in the shortwave part of the SXR region (where the structure period d=15-25Å and the number of efficiently reflecting periods 100) amounts to fractions of Ångstrom.

© 1992 Optical Society of America