Nanoscale Coatings

Norbert Kaiser; Martin Bischoff; Torsten Feigl; Ulrike Schulz; Olaf Stenzel

doi:10.1364/OIC.2010.WA1

Optical Interference Coatings
OSA Technical Digest (Optica Publishing Group, 2010),
paper WA1
•https://doi.org/10.1364/OIC.2010.WA1

Nanoscale Coatings

Norbert Kaiser, Martin Bischoff, Torsten Feigl, Ulrike Schulz, and Olaf Stenzel

Optical Interference Coatings 2010

Tucson, Arizona United States
6–11 June 2010
ISBN: 978-1-55752-891-9

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Nano- and Microstructure (WA)

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N. Kaiser, M. Bischoff, T. Feigl, U. Schulz, and O. Stenzel, "Nanoscale Coatings," in Optical Interference Coatings, OSA Technical Digest (Optica Publishing Group, 2010), paper WA1.

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Abstract

Further progress on the manufacture of nanoscale coatings requires control of film microstructure at the atomic level. Latest results from coatings for EUV- and DUV-lithography, coatings and nanostructures on plastics and balanced properties coatings will be presented.

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