Author Affiliations

O Stenzel,^1,* S Wilbrandt,¹ M Schürmann,¹ N Kaiser,¹ H Ehlers,² M Mende,² D Ristau,² S Bruns,³ M Vergöhl,³ M Stolze,⁴ M Held,⁵ H Niederwald,⁶ T Koch,⁶ W Riggers,⁷ P Burdack,⁸ G Mark,⁹ R Schäfer,¹⁰ S Mewes,¹¹ M Bischoff,¹¹ M Arntzen,¹² F Eisenkrämer,¹³ M Lappschies,¹⁴ S Jakobs,¹⁴ S Koch,¹⁵ and B Baumgarten¹⁵

¹Fraunhofer-Institute for Applied Optics and Precision Engineering IOF, Albert-Einstein-Straße 7, D-07745 Jena, Germany

²Laser Zentrum Hannover e.V., Hollerithallee 8, D-30419 Hannover, Germany

³Fraunhofer-Institute for Surface Engineering and Thin Films IST, Bienroder Weg 54E, D-38108 Braunschweig, Germany

⁴Umicore Materials AG, Alte Landstraße 8, FL-9496 Balzers, Liechtenstein

⁵Bte Bedampfungstechnik GmbH, Am Ganzacker 2, D-56479 Elsoff, Germany

⁶Carl Zeiss Jena GmbH, Carl-Zeiss-Straße 22, D-73447 Oberkochen, Germany

⁷Laseroptik GmbH, Gneisenaustraße 14, D-30826 Garbsen, Germany

⁸InnoLight GmbH, Garbsener Landstraße 10, D-30419 Hannover, Germany

⁹Melec GmbH, Moritzenmatten 21, D-77815 Bühl, Germany

¹⁰robeko, Ackerwiese 14, D-67728 Münchweiler, Germany

¹¹Linos Photonics GmbH & Co. KG, Königsallee 23, D-37081 Göttingen, Germany

¹²Arcon II Flachglasveredelung GmbH & Co. KG, Schorba 4, D-07751 Bucha, Germany

¹³Leica Microsystems CMS GmbH, Ernst-Leitz-Straße 17-37, D-35578 Wetzlar, Germany

¹⁴mso jena Mikroschichtoptik GmbH, Carl-Zeiss-Promenade 10, D-07745 Jena, Germany

¹⁵Berliner Glas KGaA Herbert Kubatz GmbH & Co., Waldkraiburger Straße 5, D-12347 Berlin, Germany

^*Corresponding author: olaf.stenzel@iof.fraunhofer.de