Abstract
Post-fluorination process that consists of ‘fluorination of F-poor areas’ and ‘modification to denser structure’ has been developed. This process reduces the optical losses of fluoride films and prevents the losses from increasing with elapsed time.
© 2004 Optical Society of America
PDF ArticleMore Like This
Toshiya Yoshida, Keiji Nishimoto, Keiichi Sekine, and Kazuyuki Etoh
WF5 Optical Interference Coatings (OIC) 2004
E. Fukumoto, T. Aoki, and S. Ogura
TuF9 Optical Interference Coatings (OIC) 2001
Christoph Zaczek, Alexandra Pazidis, and Horst Feldermann
FA1 Optical Interference Coatings (OIC) 2007