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Optical and structural properties of coatings for the UV/VUV-spectral range

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Abstract

The performance of fluoride and oxide coatings in the UV/VUV spectral range is strongly connected to their structural properties. Structural and optical characteristics of fluoride and oxide layers produced by different deposition techniques (E-Beam, Boat, IBS) will be presented and enclosed in an overview of fluoride and oxide material deposition processes.

© 2001 Optical Society of America

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