Abstract

The purpose of our work is to observe the optical energy gap shift for amorphous thin films of cerium oxide produced by addition of CF₄ to Ar and O₂ gas mixture during rf sputtering of Ce target. It has been expected that the refractive index of cerium oxyfluoride in thin film form decreases as the CF₄ concentration increases. Such bandgap- and index- controllable coating materials may be useful for both energy efficiency and optical multilayer devices.

© 1992 Optical Society of America