Abstract
Tantalum pentoxide (Ta2O5) coatings are widely used for optical applications. The material has a high index of refraction in the visible region (~2.2) with a wide transmission range which extends from 300 nm to about 10 µm. Coatings of Ta2O5 are used as a high index for interference coatings and as a protective coating, especially for high temperature applications. Deposition processes for Ta2O5coatings have been reviewed by McNally.1
© 1992 Optical Society of America
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