Abstract

Organometallic vapor phase epitaxy (OMVPE) is a deposition technique that is increasingly applied to large scale manufacturing of electronic devices. This technique can produce single crystalline, high purity epitaxial layers with good thickness and composition controllability and can achieve high deposition rates (>10 nm/sec). For optical coatings, the crystalline nature of the layers ensures the absence of defects and therefore enhanced reliability and environmental stability.

© 1992 Optical Society of America