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Design and plasma-deposition of dispersion-corrected multiband rugate filters

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Abstract

The inverse Fourier transform method is one of the most efficient synthesis method for the design of inhomogeneous optical coatings. However, this method assumes dispersion-free optical constants, which can induce undesired shifts in the spectral properties of coatings with complex features when “real” optical materials are introduced during fabrication. We describe a simple method for considering the dispersion in the synthesis of multiband rugate filter designs. The filters were then fabricated on glass substrates using plasma-deposition of silicon oxynitrides and silicon oxide-titanium oxide mixtures with precisely controlled composition gradients.

© 2001 Optical Society of America

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