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Transparent Conducting Indium-Doped ZnO Films by D.C. Reactive S-Gun Magnetron Sputtering*

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Abstract

Transparent conducting coatings have found major applications in a number of electronic and opto-electronic devices. Among many transparent conducting coatings indium oxide films doped with tin (ITO) prepared by a number of deposition techniques have shown excellent performances in optical transparency and electrical conductivity. However, many efforts have been made to develop transparent conducting ZnO films since ZnO is a less expensive coating material than ITO. Zinc oxide thin films are transparent due to a wide band gap of about 3.2 ev, and exhibit conductivity due to a large free carrier concentration created by oxygen deficiency or intentional doping.

© 1988 Optical Society of America

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