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Conferences > OIC > 2016 > TD > TD.11

High Transparent Conductive Aluminum-doped Zinc Oxide Thin Films by Reactive Co-Sputtering

Lirong Sun, Neil R Murphy, John Jones, and John Grant

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Abstract

Al-doped ZnO films were fabricated using reactive magnetron sputtering simultaneously using separate Zn and Al targets. The AZO films showed high transparency in the visible region and low transmittance in the near IR regions.

© 2016 Optical Society of America

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