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Conferences > OFC > 2023 > W2B > W2B.1

Thin-film Lithium Niobate Photonic Devices on 8-inch Silicon Substrates

Hengyu Wang, Yang Xu, Zhaoyi Li, Lianxi Jia, Shiyang Zhu, Yuxi Wang, Zhanshi Yao, Shaonan Zheng, Qize Zhong, Yuan Dong, and Ting Hu

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Abstract

Thin-film lithium niobate photonic devices are first demonstrated on 8-inch silicon substrates. The fabrication is done in a commercial semiconductor foundry. A waveguide propagation loss of 0.47±0.09 dB/cm is achieved at 1550 nm wavelength.

© 2023 The Author(s)

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