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Conferences > CLEO_SI > 2023 > STh4O > STh4O.4

Low Loss Thin-Film Lithium Niobate Modulator with T-Rail Electrodes on Quartz Substrate Fabricated by Photolithography

Yongqian Tang, Heng Li, Quanan Chen, Xiangyang Dai, Qiaoyin Lu, Mingzhi Lu, and Weihua Guo

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Abstract

We fabricated high-performance thin-film lithium niobate modulators with T-rail electrodes through photolithography. The 10-mm-long device shows a half-wave voltage of 2.2 V, fiber-to-fiber insertion loss of 3.9 dB, 2-dB EO bandwidth of 67 GHz.

© 2023 The Author(s)

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