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Demonstration and Fabrication Tolerance Study of a Low-Loss, Ultra-broadband Rapid Adiabatic 3-dB Coupler in a Next- Generation 45 nm Monolithic Electronic-Photonic Platform

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Abstract

We demonstrate a rapid adiabatic coupler (RAC) with 50±1.08% power splitting ratio over 100 nm and insertion loss <0.2 dB at 1290 nm. We measure the device over seven reticles and show low variations in splitting ratio and insertion loss across the wafer.

© 2021 The Author(s)

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