In situ ellipsometric study of the growth of dielectric thin films

J. Rivory, S. Fisson, V. Nguyen van, Ph. Roisin, G. Vuye, Y. Wang, and F. Abelès

OSA Annual Meeting 1993

Open Access

Abstract

CaF₂ and TiO₂ films, evaporated by a K-cell and by an electron gun respectively, are grown on Si substrates at high temperature.

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