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A scanning reflectance laser-feedback interferometric microscope capable of nanometer-scale profile height measurements of surfaces

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Abstract

Using laser feedback interferometry (LFI) in which the amplitude and phase of the retroreflected beam modulates the intensity of the laser, we have constructed a scanning reflection confocal microscope with a vertical resolution of ~1 nm and a lateral resolution exceeding that of other confocal microscopes. Images obtained with this microscope display contrast because of surface topography, coherent reflectivity, and object motion. Surface reflectivities as low as 10–6 and picometer amplitude vibrational motions are easily observed. In addition, because of the simplicity of LFI's configuration, alignment of the system is remarkably simple. Further studies include the possibility of higher lateral resolution by using superresolution methods, and characterization of photon weak-localization phenomena in amorphous materials.

© 1992 Optical Society of America

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