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Chemical-beam epitaxy for advanced optoelectronic devices

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Abstract

As a hybrid technology of MBE and MOCVD, chemical beam epitaxy exploits the major advantages of the two epitaxial growth techniques. The fabrication of sophistacated heterostructures and quantum-well device structures based on advanced II-VI and III-V sermiconductors will be highlighted.

© 1990 Optical Society of America

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