Automatic surface inspection system for magnetic disk substrates using a laser multisensing technique

Y. Yoneda; A. Arai; Y. Nishimoto; Y. Nakai

doi:10.1364/OAM.1989.FT3

Annual Meeting Optical Society of America
Technical Digest Series (Optica Publishing Group, 1989),
paper FT3
•https://doi.org/10.1364/OAM.1989.FT3

Automatic surface inspection system for magnetic disk substrates using a laser multisensing technique

Y. Yoneda, A. Arai, Y. Nishimoto, and Y. Nakai

OSA Annual Meeting 1989

Orlando, Florida United States
15–20 October 1989
ISBN:

From the session
Optical Metrology (FT)

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Y. Yoneda, A. Arai, Y. Nishimoto, and Y. Nakai, "Automatic surface inspection system for magnetic disk substrates using a laser multisensing technique," in Annual Meeting Optical Society of America, Technical Digest Series (Optica Publishing Group, 1989), paper FT3.

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Abstract

A laser multisensing technique for detection and discrimination of various kinds of microdefect on diamond turned surfaces of magnetic disk substrates has been designed and implemented on a fully automatic surface inspection system.

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