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Inspection of optical surfaces using a pulsed laser and video microimaging system

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Abstract

A highly sensitive method is described for inspection of optical surfaces for defects that contribute to scattering, localized absorption, and laser-induced damage. The sample surface is illuminated with a visible-wavelength dye laser source producing 1-jnsec pulses at rates of up to 100 Hz at an average power of up to 50 W. The optical system provides an illuminated area of up to 1 × 2 cm with a uniformity of ±5 %, Scattering or luminescence from microdefects is observed with a video microimaging system (VIMS) consisting of a close-focusing Questar telescope equipped with a high-sensitivity Saticon color video camera. Spatial resolution is estimated to be 10 μm or better in a 1× 0.8-mm field, although smaller defects can be easily detected. At nondamaging energy densities, the illumination pattern of dielectric mirrors depends on laser wavelength indicating a dependence on defect size and position within the tuned multilayer coating. Polarization characteristics have also been investigated.

© 1984 Optical Society of America

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