Thermo-optic Properties in PECVD Silicon Rich Silicon Carbide

Li-Yang Sunny Chang; Steve Pappert; Paul K.L. Yu

doi:10.1364/NOMA.2022.NoTh2E.4

Optica Advanced Photonics Congress 2022
Technical Digest Series (Optica Publishing Group, 2022),
paper NoTh2E.4
•https://doi.org/10.1364/NOMA.2022.NoTh2E.4

Thermo-optic Properties in PECVD Silicon Rich Silicon Carbide

Li-Yang Sunny Chang, Steve Pappert, and Paul K.L. Yu

Novel Optical Materials and Applications 2022

Maastricht,Limburg Netherlands
24–28 July 2022
ISBN: 978-1-957171-16-6

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Tunable Optical Materials (NoTh2E)

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L. S. Chang, S. Pappert, and P. K. L. Yu, "Thermo-optic Properties in PECVD Silicon Rich Silicon Carbide," in Optica Advanced Photonics Congress 2022, Technical Digest Series (Optica Publishing Group, 2022), paper NoTh2E.4.

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Abstract

We study the thermo-optic coefficient of silicon carbide with different silicon content. We demonstrate a clear trend between the silicon content and the thermo-optic coefficient which measured as high as 1.88× 10⁻⁴ ℃⁻¹.

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