Silicon rich silicon nitride for efficient thermo-optic switches

Hani Nejadriahi; Steve Pappert; Yeshaiahu Fainman; Paul Yu

doi:10.1364/NOMA.2021.NoTu2D.5

OSA Advanced Photonics Congress 2021
OSA Technical Digest (Optica Publishing Group, 2021),
paper NoTu2D.5
•https://doi.org/10.1364/NOMA.2021.NoTu2D.5

Silicon rich silicon nitride for efficient thermo-optic switches

Hani Nejadriahi, Steve Pappert, Yeshaiahu Fainman, and Paul Yu

Novel Optical Materials and Applications 2021

Washington, DC United States
26–29 July 2021
ISBN: 978-1-943580-94-1

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Phase-change and Tunable Materials (NoTu2D)

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H. Nejadriahi, S. Pappert, Y. Fainman, and P. Yu, "Silicon rich silicon nitride for efficient thermo-optic switches," in OSA Advanced Photonics Congress 2021, B. Yang, F. Leo, A. Tauke-Pedretti, S. Arafin, M. Clerici, L. Caspani, L. Busse, M. Kats, J. Fan, W. Ming (Steve) Lee, D. Caplan, N. Parsons, W. Freude, C. Tremblay, D. Hillerkuss, K. Igarashi, H. Elgala, N. Guerrero Gonzalez, R. "Patty" Stabile, K. Jaeger, R. Saive, H. Aziz, and H. Tan, eds., OSA Technical Digest (Optica Publishing Group, 2021), paper NoTu2D.5.

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Abstract

We demonstrate low loss ultra-compact bends in PECVD silicon rich silicon nitride and utilize them towards realizing efficient thermo-optic MMI switches with P_π = 23 mW and a footprint of 68 x 68 µm².

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