Abstract
Wide-band-gap II-VI compound semiconductors show great promise for the fabrication of LED's and lasers in the visible range [1]. In this paper we examine fundamental aspects of the processing of the surfaces of such materials, specifically the CdTe(110), surface, utilizing Electron Cyclotron Resonance (ECR) generated plasmas and laser-induced photochemical reactions.
© 1995 Optical Society of America
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