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Phase Change W-doped VO2/TiO2(R)/AZO Thermochromic Device for Temperature Control and Sensing

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Abstract

A thin-film sensor consisting of W-VO2 was deposited onto a TiO2(R)/AZO/B270 substrate using reactive high-power impulse magnetron sputtering. The resulting crystalline quality and optical properties were investigated by UV-VIS-NIR spectroscopy and an X-ray diffractometer.

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