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Effects of DC sputtering power on the properties of AZO films deposited at room temperature for CIGS photovoltaics

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Abstract

Al:ZnO(AZO) films were deposited on glass substrate at different sputtering power. Effects of sputtering power on the properties of AZO films were investigated. And the electro-optical property of the AZO films gets optimum at 330W.

© 2012 Optical Society of America

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