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Conferences > IPRSN > 2023 > ITu1A > ITu1A.2

A MEMS tunable phase monitor with integrated photodiode read-out for silicon photonic circuits

Pierre Edinger, Alain Yuji Takabayashi, Cleitus Antony, Peter Verheyen, Umar Khan, Wim Bogaerts, Niels Quack, and Kristinn B. Gylfason

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Abstract

Electrostatic MEMS provide low power consumption to programmable photonics. However, the scaling of programmable photonics also requires solutions for circuit monitoring. We demonstrate a MEMS tunable phase monitor with integrated read-out on a foundry platform.

© 2023 The Author(s)

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