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Realization of a micro-cavity via the integration of Silicon Nitride and Lithium Niobate using micro transfer printing

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Abstract

We combine Lithium Niobate and Silicon Nitride using transfer printing and realize a micro-cavity with an experimentally measured intrinsic Q-factors of 50,000. We believe this is the first realization of such type of a micro-cavity.

© 2022 The Author(s)

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