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Conferences > FiO > 2023 > FW5E > FW5E.5

Scalable cm-scale Micro-Transfer Printing for Heterogeneous Integration of Lithium Niobate

Margot Niels, Maximilien Billet, Tom Vandekerckhove, Tom Vanackere, Günther Roelkens, and Bart Kuyken

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Abstract

Heterogeneous integration of nonlinear materials on CMOS-compatible platforms is essential to introduce high-speed modulation. We demonstrate a process to enable the printing of up to cm-scale lithium niobate devices to allow for enhanced modulation efficiency.

© 2023 The Author(s)

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