Abstract

Monitoring the growth kinetics and properties of micron-dimension structures prepared by direct-laser writing is of interest because of the similarities and differences vis-a-vis large-area thin-film growth and because of the potential application of localized laser techniques to microelectronics fabrication. This paper presents some of the recent progress in these areas. Specific topics to be discussed are the characterization by in situ optical probing of laser-written microstructures and the anlysis of the initial phases of growth in direct-laser writing.

© 1986 Optical Society of America