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Conferences > FiO > 2023 > JTu4A > JTu4A.81

Direct Comparison of the Autofluorescence of Silicon Nitride and Tantalum Pentoxide Waveguides at 532 nm

David A. Irvine, Ephrata Zelleke, Aaron Schreyer-Miller, William D. Houck, Mark A. Foster, and Amy C. Foster

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Abstract

We quantitatively compare the autofluorescence of LPCVD silicon nitride and sputtered tantalum pentoxide waveguides at 532nm and find at least a 10, 000× reduction for tantalum pentoxide, which is promising for quantum technologies and biosensors.

© 2023 The Author(s)

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